Vanadium-related deep levels in n-silicon detected by junction capacitance waveform analysis

Hisatsugu Kawahara, Yoichi Okamoto, Kenichiro Tahira, Jun Morimoto, Toru Miyakawa, Hiroshi Nakashima

    研究成果: Contribution to journalArticle査読

    4 被引用数 (Scopus)

    抄録

    Multiexponential (ME-) and spectral analysis (SA-) Deep Level Transient Spectroscopy (DLTS) are made on vanadium-related deep levels in n-silicon. We resolved three traps with large amplitude and three more traps with comparatively small amplitude, VA (ΔE = 0.08eV, σ = 3.2 × 10–18 cm2), VB (ΔE = 0.28eV, σ = 2.6 × 10–14 cm2) and VC (ΔE = 0.24eV, σ = 8.4 × 10–18 cm2). These vanadium-related levels do not have appreciable broadening of the emission rate spectrum.

    本文言語英語
    ページ(範囲)87-88
    ページ数2
    ジャーナルJapanese Journal of Applied Physics
    31
    1 R
    DOI
    出版ステータス出版済み - 1 1992

    All Science Journal Classification (ASJC) codes

    • 工学(全般)
    • 物理学および天文学(全般)

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