Wavy micro channels in micropatterned ceramic sheet formed by combined process of laser beam machining and imprinting

Fujio Tsumori, Simon Hunt, Kentaro Kudo, Toshiko Osada, Hideshi Miura

研究成果: ジャーナルへの寄稿記事

4 引用 (Scopus)

抄録

Micro channels made of polymers are commonly used for MEMS and μTAS (micro-total analysis system) devices. In this research, we developed a process for fabricating a ceramic sheet with micro channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as sheet material. We employed laser machining to machine the sacrificial layer to form micro channels inside the sheet. We also employed imprinting, which is a process of pressing with a mould while heating, to form a structure with surface patterns and micro channels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and micro channels was obtained. As ceramics have high heat durability and low chemical reactivity, ceramic micro channels can be used for flow sensors or chemical reaction testers operated in harsh environments, such as high temperature or mechanical parts operated with reactive chemicals. In addition, by imprinting wavy patterns, the surface area can be increased. Therefore high efficiency heat exchangers can be built. Moreover, this method can be applied on SOFCs (solid oxide fuel cell) by fabricating YSZ (yttria stabilized zirconia) micro channels.

元の言語英語
ページ(範囲)511-518
ページ数8
ジャーナルFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
63
発行部数7
DOI
出版物ステータス出版済み - 1 1 2016

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Laser beam machining
Polymers
Heating
Chemical reactivity
Yttria stabilized zirconia
Powder metallurgy
Solid oxide fuel cells (SOFC)
Powders
MEMS
Heat exchangers
Chemical reactions
Machining
Durability
Lasers
Sensors
Temperature

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Metals and Alloys
  • Materials Chemistry

これを引用

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abstract = "Micro channels made of polymers are commonly used for MEMS and μTAS (micro-total analysis system) devices. In this research, we developed a process for fabricating a ceramic sheet with micro channels. The developed process is based on powder metallurgy process. A compound material, a mixture of ceramic powder and polymer, was prepared as sheet material. We employed laser machining to machine the sacrificial layer to form micro channels inside the sheet. We also employed imprinting, which is a process of pressing with a mould while heating, to form a structure with surface patterns and micro channels curving along with it. After the imprinted sheet was debound and sintered by heating, a ceramic sheet with micro-surface patterns and micro channels was obtained. As ceramics have high heat durability and low chemical reactivity, ceramic micro channels can be used for flow sensors or chemical reaction testers operated in harsh environments, such as high temperature or mechanical parts operated with reactive chemicals. In addition, by imprinting wavy patterns, the surface area can be increased. Therefore high efficiency heat exchangers can be built. Moreover, this method can be applied on SOFCs (solid oxide fuel cell) by fabricating YSZ (yttria stabilized zirconia) micro channels.",
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