Wet process-based fabrication of WO3 thin film for NO 2 detection

Yong Gyu Choi, Go Sakai, Kengo Shimanoe, Noboru Yamazoe

研究成果: ジャーナルへの寄稿学術誌査読

55 被引用数 (Scopus)


It was tried to fabricate a WO3 thin film device through a wet process starting from an aqueous sol of WO3·2H2O. When mixed with polyethylene glycol (PEG, molecular weight 6000), the sol was made compatible to spin coating on an alumina substrate and the coating could be converted into a WO3 thin film by calcination at 300°C for 2h. Starting with a typical coating dispersion containing WO 3·2H2O by 5mass% on WO3 basis and 2mass% PEG, the WO3 film obtained was 450nm in mean thickness. The film was a slim pack of square plates, each of which was a stack of thin lamellar crystals of WO3. The device was sensitive enough to detect 50ppb NO2 in air at 200 or 250°C, although the response and recovery transients were rather sluggish. Unexpectedly, the transients were found to be sharpened drastically in humid atmosphere, while sensor response (sensitivity) to NO2 was hardly degraded with humidity.

ジャーナルSensors and Actuators, B: Chemical
出版ステータス出版済み - 6月 15 2004

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学


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