TY - JOUR
T1 - X-ray diffraction study of cubic-phase AlN thin films grown on sapphire(0001) substrates by pulsed laser deposition
AU - Sumitani, Kazushi
AU - Ohtani, Ryota
AU - Yoshida, Tomohiro
AU - Mohri, Satoshi
AU - Yoshitake, Tsuyoshi
PY - 2011
Y1 - 2011
N2 - Cubic-phase AlN thin films were fabricated on sapphire(0001) substrates by pulsed laser deposition at an extremely high-pressure ambient nitrogen. The crystallographic properties of the films were evaluated using X-ray diffraction techniques. The θ-2θ measurements showed diffraction peaks originating from different c-AlN structure between the films grown in the nitrogen atmosphere at 30 Torr and 80 Torr, which implied that the structural phase of c-AlN films was sensitive to the pressure of the ambient nitrogen. We investigated the details of the AlN 11̄1 diffraction spots from the films at 80 Torr and revealed that the films were epitaxially grown on the substrates with the relationship ofc-AlN(111)[12̄1]//Al2O 3(0001)[112̄0].
AB - Cubic-phase AlN thin films were fabricated on sapphire(0001) substrates by pulsed laser deposition at an extremely high-pressure ambient nitrogen. The crystallographic properties of the films were evaluated using X-ray diffraction techniques. The θ-2θ measurements showed diffraction peaks originating from different c-AlN structure between the films grown in the nitrogen atmosphere at 30 Torr and 80 Torr, which implied that the structural phase of c-AlN films was sensitive to the pressure of the ambient nitrogen. We investigated the details of the AlN 11̄1 diffraction spots from the films at 80 Torr and revealed that the films were epitaxially grown on the substrates with the relationship ofc-AlN(111)[12̄1]//Al2O 3(0001)[112̄0].
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U2 - 10.1088/1757-899X/24/1/012017
DO - 10.1088/1757-899X/24/1/012017
M3 - Conference article
AN - SCOPUS:81355139741
VL - 24
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
SN - 1757-8981
IS - 1
M1 - 012017
T2 - 2010 Summer Workshop on Buried Interface Science with X-Rays and Neutrons
Y2 - 25 July 2010 through 27 July 2010
ER -