YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering

Yoshitaka Nakamura; Yuta Isozaki; Masashi Miura; Tomohiro Kuroiwa; Yutaka Yoshida; Kaname Matsumoto; Ataru Ichinose; Shigeru Horii; Masashi Mukaida; Shigetoshi Ohshima

doi:10.1109/TASC.2005.848711

YBCO thin films on TiO ₂ buffer layer deposited by RF magnetron sputtering

Yoshitaka Nakamura, Yuta Isozaki, Masashi Miura, Tomohiro Kuroiwa, Yutaka Yoshida, Kaname Matsumoto, Ataru Ichinose, Shigeru Horii, Masashi Mukaida, Shigetoshi Ohshima

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

3 被引用数 (Scopus)

抄録

Rutile structure TiO ₂ buffer layers and YBa ₂Cu ₃O _7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO ₂ buffer layers. The crystal structure of TiO ₂ thin films changed from (100) oriented anatase structure TiO ₂ to (110) oriented rutile structure TiO ₂ with increasing substrate temperature. The (110) oriented rutile structure TiO ₂ thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO ₂ buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

本文言語	英語
ページ（範囲）	3028-3030
ページ数	3
ジャーナル	IEEE Transactions on Applied Superconductivity
巻	15
号	2 PART III
DOI	https://doi.org/10.1109/TASC.2005.848711
出版ステータス	出版済み - 6月 2005
外部発表	はい

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
凝縮系物理学
電子工学および電気工学

文献へのアクセス

10.1109/TASC.2005.848711

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引用スタイル

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title = "YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering",

abstract = "Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.",

author = "Yoshitaka Nakamura and Yuta Isozaki and Masashi Miura and Tomohiro Kuroiwa and Yutaka Yoshida and Kaname Matsumoto and Ataru Ichinose and Shigeru Horii and Masashi Mukaida and Shigetoshi Ohshima",

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AU - Nakamura, Yoshitaka

AU - Isozaki, Yuta

AU - Miura, Masashi

AU - Kuroiwa, Tomohiro

AU - Yoshida, Yutaka

AU - Matsumoto, Kaname

AU - Ichinose, Ataru

AU - Horii, Shigeru

AU - Mukaida, Masashi

AU - Ohshima, Shigetoshi

PY - 2005/6

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N2 - Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

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