YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering

Yoshitaka Nakamura, Yuta Isozaki, Masashi Miura, Tomohiro Kuroiwa, Yutaka Yoshida, Kaname Matsumoto, Ataru Ichinose, Shigeru Horii, Masashi Mukaida, Shigetoshi Ohshima

研究成果: Contribution to journalArticle査読

3 被引用数 (Scopus)

抄録

Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

本文言語英語
ページ(範囲)3028-3030
ページ数3
ジャーナルIEEE Transactions on Applied Superconductivity
15
2 PART III
DOI
出版ステータス出版済み - 6 2005
外部発表はい

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 電子工学および電気工学

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